Partager cette page
Membres
UCL – ICTEAM / Sensors, Microsystems and Actuators Laboratory of Louvain (SMALL)

TVA 419.052.272
Acteur R&D

Monsieur Flandre Denis
Professeur

Description

Bulk and surface micromachining sensors for chemical, medical and harsh environments applications. The group members are focused on varied devices design and fabrication of MEMS and NEMS structures co-integrated with SOI CMOS circuits: design and fabrication of NEMS-based lab-on-chip to characterize the electromechanical properties of materials at nanometer scale, nanowires gas sensors, nanoporous silicon membranes, magnetometers, flow, humidity, pressure and inertial sensors, surface acoustic wave device, etc.

Processing...
Thank you! Your subscription has been confirmed. You'll hear from us soon.
ErrorHere